Micro-Channel Plate Detectors Based on Hydrogenated Amorphous Silicon
نویسندگان
چکیده
منابع مشابه
Presented at the MRS Spring Meeting 2010 1 Micro-Channel Plate Detectors Based on Hydrogenated Amorphous Silicon
A new type of micro-channel plate detector based on hydrogenated amorphous silicon is proposed which overcomes the fabrication and performance issues of glass or bulk silicon ones. This new type of detectors consists in 80-100 μm thick layers of amorphous silicon which are micro-machined by deep reactive ion etching to form the channels. This paper focuses on the structure and fabrication proce...
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متن کاملFirst-principles study of hydrogenated amorphous silicon
K. Jarolimek,1,2 R. A. de Groot,2 G. A. de Wijs,2 and M. Zeman1 1DIMES, Delft University of Technology, Feldmannweg 17, 2600 GB Delft, The Netherlands 2Electronic Structure of Materials, Institute for Molecules and Materials, Faculty of Science, Radboud University Nijmegen, Heyendaalseweg 135, 6525 AJ Nijmegen, The Netherlands Received 23 May 2008; revised manuscript received 9 February 2009; p...
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ژورنال
عنوان ژورنال: MRS Proceedings
سال: 2010
ISSN: 0272-9172,1946-4274
DOI: 10.1557/proc-1245-a08-04